The V500 SIMS

A new benchmark for FIB-SIMS

The V500 is the revolutionary, multi award winning FIB-SIMS add-on from Lion Nano-Systems. The multi award winning V500 sets new standards for high spatial resolution FIB-SIMS with an unprecedented lateral resolution of 15 nm! The V500 combines innovative technologies such as our unique Thru-Field extraction optics with a high transmission focal plane spectrometer permitting spatial resolutions as high as 15 nm for SIMS imaging and even higher for SI/SE imaging!

Main features:

  • High spatial resolution analysis

  • DC operation (no duty cycle)

  • Unique correlative capabilities

  • Multiple application domains (Semiconductor, Li-Battery, Biology...)

 

Technology

Thru-Field extraction

 

The V500's unique Thru-Field extraction system sits directly above the sample giving it the largest possible solid angle for efficient collection of secondary ions. Despite sitting directly above the sample, the V500's Thru-Field extraction optics have been specifically designed to maintain the high spatial resolution  of  FIB systems - probe sizes of less than 4 nm have been demonstrated*. The extraction system is retractable and so gives full access to the sample when not in use.

High Transmission Spectrometer

 

The V500's floating configuration allows secondary ions to be transported efficiently through the optics with minimal losses, providing high sensitivity in all analysis modes. The extended focal plane design of the spectrometer allows a wide range of masses to be focused on the the multi-collection system simultaneously (ratio of highest to lowest mass >100). The combination of high efficiency extraction and high transmission optics leads to sensitivities up to 100x higher than systems based on O-TOF spectrometers.

Detection system

 

The V500 has two detection modes: Total Ion and Multi-collection. The total ion mode can be used to rapidly image samples to determine regions of interest and for high resolution correlative imaging. 

In multi-collection mode the secondary ions pass through the spectrometer and are mass filtered (mass resolution M/dM:  > 400 FWHM) and 4 mass lines can be detected simultaneously. Unlike O-TOF or quadruple systems, the V500 can image and depth profile with no duty cycle.

Analysis

Imaging

Effortlessly image with the highest spatial resolution on the market.

The V500's multi-collection system allows images of up to 4 masses to be acquired simultaneously. A dedicated total ion counter allows instant switching between SIMS and SE/SE imaging. High efficiency electron multipliers ensure low noise performance and continuous DC operation ensures fast data acquisition.

In-situ image correlation

Overlay SIMS and SE images for the ultimate combination: high sensitivity meets high resolution.

As the V500 brings SIMS directly to your FIB, SIMS and SE/SI imaging can now be performed in-situ. No need to transfer your sample to another instrument, swap between SIMS and SE/SI modes in seconds.

Mass Spectra

Analyse your samples quickly and efficiently with a mass range from H-U. Create spectra with both field sweep and detector sweep modes. Unlike EDS, SIMS has no background, can detect light elements such as H or Li and can distinguish between isotopes.

Depth profiling / 3D analysis

For applications such as multi-layer samples or endpointing, investigate elemental distributions in Z by depth profiling. The V500's high spatial resolution allows unique small area depth profiling capabilities: craters smaller  than 500 nm x 500 nm are possible. High transmission ensures low detection limits. Extend your analysis into X and Y with 3D mode - follow up to 4 mass lines as you sputter multiple planes.

 

Features

If you would like to add SIMS to your FIB platform contact us

*ultimate resolution depends on your FIB configuration and the analyzed element.

 Listed specifications are for the V500 SIMS on the ZEISS ORION NanoFab

Luxembourg Ion Optical Nano-Systems Sàrl
Technoport 2
rue du Commerce
L-3895 Foetz
Luxembourg

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